International
Tables for
Crystallography
Volume H
Powder diffraction
Edited by C. J. Gilmore, J. A. Kaduk and H. Schenk

International Tables for Crystallography (2018). Vol. H, ch. 2.5, pp. 139-140

Section 2.5.4.2.6. Orientation relationship

B. B. Hea*

aBruker AXS Inc., 5465 E. Cheryl Parkway, Madison, WI 53711, USA
Correspondence e-mail: bob.he@bruker.com

2.5.4.2.6. Orientation relationship

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A 2D-XRD system can measure texture from a sample containing a single phase, multiple phases or single crystals. The orientation relationship between different phases, or thin films and substrates, can be revealed because data are collected from all phases of the sample simultaneously. One example is the measurement of pole figures for a magnetron sputter-deposited Cu film on an Si wafer (He et al., 2005[link]). Fig. 2.5.23[link] shows the overlapped pole figures of the Cu (111) film and Si (400) substrate in a 2D pole figure (a) and 3D surface plot (b). The three sharp spots from the (400) spots of the Si wafer show the wafer cut orientation of (111). The Cu (111) pole density maximized in the centre of the pole figure shows a strong (111) fibre texture. The orientation relationship between the film fibre axis and the substrate is clearly described by the combined pole figures. For samples containing multiple thin-film layers, the orientation relationships between the different layers of the films and substrate can be revealed by superimposing their pole figures.

[Figure 2.5.23]

Figure 2.5.23 | top | pdf |

Combined pole figure of a Cu (111) film on an Si (400) substrate: (a) regular 2D projection; (b) 3D surface plot.

References

He, B. B., Xu, K., Wang, F. & Huang, P. (2005). Two-dimensional X-ray diffraction for structure and stress analysis. Mater. Sci. Forum, 490–491, 1–6.Google Scholar








































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